Ultra-high vacuum gate valve is a valve used in ultra-high vacuum environment. Its main function is to control the flow of gas or liquid to achieve the purpose of connecting or cutting off.It has the advantages of simple structure, good sealing, and easy operation. Therefore, it has been widely used in semiconductor, optoelectronics, aerospace, national defense technology and other fields.
1. Basic structure
The main structure of ultra-high vacuum gate valve includes valve body, gate plate, sealing gasket, driving mechanism and other parts.Among them, the valve body is composed of two flanges and the middle valve body. The insert plate controls its switching state through the driving mechanism, and the sealing gasket is used to ensure the sealing performance of the valve.
2. Working principle
The working principle of ultra-high vacuum plug-in valve is to control the flow of gas or liquid through the switching status of the plug-in plate.When the insert plate is closed, the valve is in a closed state, and gas or liquid cannot flow through the valve; when the insert plate is open, the valve is in an open state, and gas or liquid can flow through the valve.
3. Application fields
Ultra-high vacuum gate valves are mainly used in semiconductor, optoelectronics, aerospace and other fields.In the semiconductor manufacturing process, ultra-high vacuum gate valves are used to control the flow of gas to ensure the purity of the semiconductor manufacturing process; in the field of optoelectronics, ultra-high vacuum gate valves are used to control the position and direction of optical components to ensure optical The accuracy of components; in the aerospace field, ultra-high vacuum gate valves are used to control the attitude and position of the spacecraft to ensure the stability of the spacecraft.
4. Common advantages
Ultra-high vacuum gate valve has the advantages of simple structure, good sealing, and easy operation.Its sealing performance can meet the requirements of ultra-high vacuum environment and can effectively control the flow of gas or liquid.In addition, the driving mechanism of the ultra-high vacuum gate valve can be selected according to needs, and various driving modes such as manual, electric, and pneumatic can be realized.
5. Development Trends
With the continuous development of science and technology, the application fields of ultra-high vacuum gate valves are also constantly expanding.In the future, ultra-high vacuum gate valves will be more intelligent and automated, enabling remote control and monitoring.In addition, the materials of ultra-high vacuum gate valves will also be more diverse and can adapt to more complex working environments.